About Us

We are one of the leading suppliers of plasma and metrology systems to the semiconductor industry for a wide range of applications from resist treatment and stress relief etching on wafers, various metrology techniques to cleaning and activation steps for advanced packaging applications.


Over 30 years of experience with plasma makes us one of the experts for plasma technology utilizing different excitation modes and process chamber designs.


Our Office in Wettenberg with factories in Jena Germany and Corona CA, U.S.A. together with the network of branch offices and representatives are bringing our technology and support close to our customers anywhere in the world.


Our dedicated application team supports our customers with their application know how in our labs as well as on the customers production sites.


The service departments in the factories together with our local branch offices help our customers with guidance in system troubleshooting via phone and e-mail and delivery of spare parts on short notice and also maintenance and refurbishment of customer systems to the latest level of technology.