Batch Process Systems
All of our batch processing systems are based on the same concept, using direct microwave excitation outside of the process chamber, process gas inlet on one side of the chamber and vacuum exhaust on the opposite side of the chamber. This concept provides good uniformity of process radical creation and transport throughout the entire process chamber. Several process chamber shapes and sizes made from different material using either MHz or Microwave excitation are available for the different applications.
The control system uses a state of the art user interface and the Linux based operating system QNX, allowing both automatic as well as manual process control. The process gas flow is controlled by MFC. All process parameters are entered as numeric values, the controller will monitor them throughout the process, generating alarms, if the set limits are exceeded.