Out of the GIGAbatch product family, the GIGAbatch 310M is the smallest and most cost effective solution for universities and research facilities, including the minimum configuration to automatically run a process. It features one gas channel with automatic flow controller and a 600W Microwave power supply.
A large range of additional options is offered to tailor the system to the individual needs depending on the planned application of the system. It features a table top housing with one process gas channel and the option of an additional channel.
The system allows to process wafers of 150mm diameter up to 25 of them in batch or as single substrate. A variety of different loading platforms will accommodate any process requirement .
A special configuration is offered for the removal of SU-8 resist, including special vacuum seals and a cooling stage with circulating chiller.