GIGAbatch 360/380M

The GIGAbatch 360M and 380M are already configured for small scale production of simple devices. The 360 versions feature a process chamber with 245mm in diameter and can process up to 50 wafers of 150mm, while the GIGAbatch 380M has a process chamber diameter of 300mm for up to 25 wafers of 200mm size.

 

The standard  configuration already includes a custom design platform to load the quartz boats for the wafers, two separate gas channels with automatic flow controller together with temperature measurement for the wafers and end-point detection in a stand-alone frame with spray painted panels, rollers and leveling feet.

 

Optional items are and the option of installing two additional channels, active process pressure control, a ceramic process chamber and special vacuum seals for fluorinated process chemistry.