Our service team offers various services including complete system maintenance for our current and many of the previous system generations including
- Replacement of all o-ring seals
- Chamber cleaning and replacement
- Mass flow controller recalibration by external service
- Upgrade to additional gas channels
- Upgrade to T-5000 controller for 300AL PC systems
Please do not hesitate to contact our service team in case you have a special requirement for configuration change, general system maintenance or other need for system rebuilding.