Systems Refurbishing

Our service team offers various services including complete system maintenance for  our current and many of the previous system generations including

  • Replacement of all o-ring seals
  • Chamber cleaning and replacement
  • Mass flow controller recalibration by external service
  • Upgrade to additional gas channels
  • Upgrade to T-5000 controller for 300AL PC systems

Please do not hesitate to contact our service team in case you have a special requirement for configuration change, general system maintenance or other need for system rebuilding.